Topic：Tool-based nano surface generation/纳米表面加工技术
Speaker: Professor MustafizurRahman (National University of Singapore)
Date: 2013年1月8日
Time: 上午9:30~11:30
Venus: 工学2号馆205机电学院会议室

Abstract: The demand for nanotechnology products with applications in the semiconductor, optical, die and mold, and such other ultra-precision industries is increasing at a phenomenal pace. The technological challenge for the fabrication of such products include highly precise mirror surface on difficult-to-machine materials such as silicon, glass, quartz, ceramics and electroless nickel. Nano surface generation techniques to achieve nanometric surface finish and shape accuracy on such materials are basic technologies for the successfully producing such products. In this presentation, first of fundamental mechanism of nano surface generation on metals using tool-based technology will be discussed. Then currently available techniques for nano surface generation will be introduced and discussed. Finally, generation of such surfaces using non-conventional tool-based method will also be presented.

摘要：半导体器件，光学，模具以及一些其它超精密工业对纳米技术产品的需求越来越多。目前制造这些产品的技术挑战主要是在一些难加工材料如硅，玻璃，石英，陶瓷以及无电镀镍的表面制作超精密镜面。利用纳米表面加工技术在这些难加工材料表面加工出纳米精度的表面和形状是能成功制造这些超精密产品的基础技术。这次讲座中，首先将介绍在金属上利用刀具来加工纳米表面的基本原理。其次介绍目前能够加工纳米表面的一些技术。最后，还将向大家介绍怎样利用非传统加工技术来获得纳米表面。

About the speaker：Professor MustafizurRahman is currently with the Department of Mechanical Engineering at the National University of Singapore. His research interests include Ultra-precision machining, micro/nano machining, design and development of machine tools and devices for micro/nano machining, and high speed machining of difficult-to-machine materials. Some of his latest research areas are: Hybrid simultaneous EDM/ECM, Ductile mode machining of brittle materials, Machining of freeform features based on Digital Images. He has received William Jonson Gold Medal for Life Time Achievement in Material Processing Research and Teaching in 2009, the Leading Edge Manufacturing Achievement Award from the JSME in 2005, and IES Prestigious Engineering Achievement Award in 2003, A M Strickland Prize from IMechE in 2009. He has authored more than 400 journal and conference papers.
Currently, he is also a director of a NUS spin-off company, MikrotoolsPte Ltd. (www.mikrotools.com) which produces machine tools for micro and nano machining.

个人简介：MustafizurRahman教授是新加坡国立大学工学院机械工程系的终身教授，CIRP Fellow。他的研究领域主要包括；超精密加工，微纳米加工，适用微纳米加工及难加工材料高速加工的超精密机床及设备的设计和研发。MustafizurRahman教授目前进行的研究包括：EDM/ECM复合加工技术研究，脆性材料的塑性加工技术研究以及基于数字图片的自由曲面零件加工。MustafizurRahman教授在国际著名的期刊及学术会议发表了超过400篇的研究论文。由于MustafizurRahman教授在材料加工领域的终身成就以及在教学方面的卓越贡献，MustafizurRahman教授获得了2009年William Jonson金奖，2009年A M Strickland奖， 2005年JSME制造前沿成就奖，2003年IES卓越工程成就奖。
MustafizurRahman教授还担任了MikrotoolsPte Ltd(www.mikrotools.com)的董事，以进行微细制造技术的商业化应用。MikrotoolsPte Ltd是一家专注于生产微纳米加工设备的高科技公司，并获得了新加坡国立大学的投资。